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Surf-Cal Size Standards

We have established specific particle sizes for use in calibrating Scanning Surface Inspection Systems (SISS) used in the semiconductor industry.
By working with instrument manufacturers, the Surf-Cal product line was created to meet SEMI standard guidelines. Available sizes include those considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS)1.
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Surf-Cal Particle Size Standards

◇ 입자성분 : Polystyrene
◇ 입자밀도 : 1.05 g/cm3
◇ 굴절율 : 1.59 @ 589 nm (25°C)
◇ 포장단위 : 50ml
◇ 사이즈 : 0.047 - 3.04um
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